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highly stable monocrystalline silicon pressure/differential pressure sensor chips

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xRange | 40kPa | Overvoltage (back) | 5MPa |
---|---|---|---|
Overvoltage (positive) | 6MPa | Recommended Voltage | 4.5~5.5V |
Bias | < 0.050 %FS |
Bewis BW-MD series of highly stable monocrystalline silicon sensor chip, which has a number of excellence performance, and has been batch cast to the international market. It has been widely used in petrochemical, metallurgical power, industrial automation, aerospace, Internet of things and other fields in Europe, Asia.
Characteristics(Measured at I=0.3mA, T=23°C)
Parameters | min | typ | max | Unit | |
Bridge Resistance | 9.5 | 10 | 10.5 | kΩ | |
Offset Voltage | -3 | 0 | +3 | mV/V | |
Supply Voltage | - | 3 | 10 | V | |
Supply Current | - | 0.3 | 1 | mA | |
Temperature Coefficient of Bridge Resistance | +0.05 | +0.08 | +0.12 | %FS/K | |
Temperature Coefficient of Zero Point | -0.05 | ±0.03 | +0.05 | %FS/K | |
Temperature Coefficient of Full Scale | -0.05 | -0.08 | -0.15 | ||
Temperature Bias (42h, 30℃ to 135℃ to 30℃) |
0.02 | 1 | 2 | uV/V | |
Static Pressure Characteristics | - | 0.03 | - | ±%FS/10MPa | |
Long-term Stability (1000h, 135℃ | - | ≤ 3 | ±5 | uV/V | |
Nonlinearity | - | ≤ 0.3 | - | ±%FS | |
Sensitivity | MD1-MD2 | 6 | 8 | 10 | mV/V |
MD3-MD8 | 15 | 20 | 25 | mV/V |
Stability( Heating from 23℃ to 85℃ for 30 hours,returning to 23℃. Measuring zero drift over 42 hours)